Conductive-probe atomic force microscope

I constructed a conductive-probe atomic force microscope during my work on the diploma thesis in years of 2007–2008. Having the benefit of sharing the experience of my older Colleagues, who were working on various SPM devices before, I introduced solutions, which later became standard in construction of a modular SPM system Drobnowidz. These were:

  • a specialised microprobe holder for conductive and resonant probes, compatible with NanoWorld’s Pointprobe® microprobes;
  • the base of an SPM measurement head: the heaviest part of a Drobnowidz SPM system, holding the piezoelectric scanner and used for routing the electrical connections;
  • a modified measurement head with laser and a deflection beam routing system; following my first attempts, the construction was significantly amended and further developed by Grzegorz Gruca.

I utilised the constructed C-AFM for investigations of electrical properties of silicon oxynitride (SiOxNy) thin films, one of the so-called high-κ materials, used in microelectronics to substitute the silicon dioxide. I carried out the experiments using samples obtained from AMD Saxony.